25231: Semiconductor Technology
Course Name: Semiconductor Technology
Course Number: 25231
Prerequisite(s): -
Co-requisite(s): -
Units: 3
Level: Postgraduate
Last Revision: Fall 2019
Description:
Syllabus:
Course Number: 25231
Prerequisite(s): -
Co-requisite(s): -
Units: 3
Level: Postgraduate
Last Revision: Fall 2019
Description:
The aim of this course is to familiarize students with the new materials and processes of micro- and nanoelectronics.
Syllabus:
- Modern Materials: GaN, SiGe, AlN, Graphene, CNT, SiC, …
- Modern Lithography: EUV, Diff Compensation, Multiple Exposure, Nano Sphere Lith (NSL), Nano Scratching, SNOL, Modern Ebeam Lithography
- Modern Doping: Advanced Ion Implantation Methods, Plasma Immersion Doping
- Modern Deposition: ALD, NFCVD, Atomic Manipulation
- Advanced Etching: Novel Plasma Processing, Near Field Etching
- Modern Simulation Methods
- Advanced Measurement and Charcterization: SPM Based Characterization, Advanced CV, Novel Ebeam Methods
- Modern Active and Passive Device Examples
- Class Notes & Selected Papers
Last Update: 2024-05-25